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| Customization: | Available |
|---|---|
| Warranty: | One Year |
| Type: | Coating Production Line |
Magnetron Sputtering Coater Introduction:
Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with three 300W RF power supply, ideal for the preparation of non-metal materials. The three targets can meet the needs of multi-layer or multiple coatings.
The coating machine is equipped with two-channel high-precision mass flowmeters and advanced turbomolecular pump sets (ultimate vacuum up to 1.0E-5Pa). Most functions such as vacuum pump control and sputtering power control can be integrated into an industrial computer for higher experimental efficiency.
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. It is an ideal equipment for preparing material films in laboratories due to its small size and easy operation.
| Category | Feature | Specification |
|---|---|---|
| Sample Stage | Size | φ185mm |
| Heating Temp | Max 500ºC (±1ºC accuracy) | |
| Target Head | Quantity | 2" × 3 (1", 2" optional) |
| Cooling | Water cooling (Flow: 10L/min) | |
| Chamber | Size | φ300mm × 300mm |
| Material | Stainless Steel (Top cover open) | |
| Flowmeter | Channels | 2 channels (100sccm, customizable) |
| Vacuum System | Pump Types | Molecular pump (600L/S) + Rotary vane pump |
| Ultimate Vacuum | 1.0E-5Pa | |
| Pumping Rate | Vacuum up to 1.0E-3Pa in 20 minutes | |
| Power | Configuration | RF power supply × 3 (Max 300W each) |
| Dimensions | Overall Size | 600mm × 650mm × 1280mm |
| Weight | Total Weight | 300kg |



Specializing in the development and production of laboratory technology research equipment since 2005. The product range includes mixing, pressing, burning, cutting, grinding, polishing, coating, and analytical equipment along with related consumables. Currently exporting to 25 countries and regions including the United States, Europe, and Southeast Asia, serving prestigious scientific research units and universities.