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Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems
Basic Information
Model NO.
CY-MSP300S-3RF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Dia. 185mm
Heating Temp.
Max 500℃
Rotate Speed
1-20rpm Adjustable
Chamber Material
Stainless Steel
Package Size
110.00cm * 100.00cm * 130.00cm
Gross Weight
360.000kg
Production Cap.
100pieces/Month
Product Description

Magnetron Sputtering Coater Introduction:

Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with three 300W RF power supply, ideal for the preparation of non-metal materials. The three targets can meet the needs of multi-layer or multiple coatings.

The coating machine is equipped with two-channel high-precision mass flowmeters and advanced turbomolecular pump sets (ultimate vacuum up to 1.0E-5Pa). Most functions such as vacuum pump control and sputtering power control can be integrated into an industrial computer for higher experimental efficiency.

Applications

This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. It is an ideal equipment for preparing material films in laboratories due to its small size and easy operation.

Technical Parameters
Category Feature Specification
Sample StageSizeφ185mm
Heating TempMax 500ºC (±1ºC accuracy)
Target HeadQuantity2" × 3 (1", 2" optional)
CoolingWater cooling (Flow: 10L/min)
ChamberSizeφ300mm × 300mm
MaterialStainless Steel (Top cover open)
FlowmeterChannels2 channels (100sccm, customizable)
Vacuum SystemPump TypesMolecular pump (600L/S) + Rotary vane pump
Ultimate Vacuum1.0E-5Pa
Pumping RateVacuum up to 1.0E-3Pa in 20 minutes
PowerConfigurationRF power supply × 3 (Max 300W each)
DimensionsOverall Size600mm × 650mm × 1280mm
WeightTotal Weight300kg
Detailed Photos
System Component Overview
Company Overview

Specializing in the development and production of laboratory technology research equipment since 2005. The product range includes mixing, pressing, burning, cutting, grinding, polishing, coating, and analytical equipment along with related consumables. Currently exporting to 25 countries and regions including the United States, Europe, and Southeast Asia, serving prestigious scientific research units and universities.

Factory Facilities
Production Line
Certifications
Frequently Asked Questions
Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory. We have mature technical experience and can guarantee product quality and optimal pricing.
How is your product after-sales service system?
The product warranty period is 12 months, and we provide lifetime maintenance. Our professional pre-sales and after-sales departments respond within 24 hours to resolve any technical issues.
How long is the delivery time for custom instruments?
For goods in stock, delivery is 5-10 days. For customized services, it usually takes 30-60 days depending on the specific technical requirements of the instrument.
How do you solve power supply and plug differences for different countries?
We supply transformers and plugs according to your local requirements and national power standards.
What are your accepted payment methods?
We accept T/T, L/C, D/P, and other standard payment methods, including Trade Guarantee services.
What is your standard packaging and delivery method?
We use standard export fumigation wooden box packaging. Delivery can be arranged via express, air, or sea shipping according to your specific needs.

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